The Veeco Dektak 6M Profiler is an instrument that is capable of making advanced small-scale measurements on a variety of substrates.  Measurements of thick and thin film heights, surface topography, surface waviness and surface roughness, among other things, can be easily carried out on micro- and nanostructures using this instrument.  The Dektak 6 M utilizes a diamond-tipped stylus to measure these small features.  A precision x-y stage moves the sample under the stylus, and vertical displacements in the stylus are converted into an electrical signal corresponding to the dimensions of the feature(s).  These electrical signals are then converted to a digital format where they can be displayed on a computer screen and manipulated to determine various analytical information about the substrate.  Scan length and scan speed can be fine-tuned to increase or decrease analysis time and resolution.  Additionally, the stylus force can be varied to be compatible with either hard or soft surfaces.  Below are some technical specifications of the Veeco Dektak 6M Profiler.