Nanoscale Characterization Facility - Indiana University, Department of Chemistry

Sputter Coater


The desk V series is based on Cold Sputtering Platform. It is used extensively for scanning electron microscope (SEM) and transmission electron microscope (TEM) sample preparation applications. The desk V series includes standard systems, high power systems, and turbo pumping systems and has the following features:

Fast cycle times
The pump down–coating–venting cycle completes in less than five minutes.

Protected samples
Specimens are protected from damage by Denton’s patented anode grid which collects stray electrons and prevents them from bombarding the sample.

Reduced contamination
A manual shutter reduces contamination during the etch process.

Removable shutter
The shutter can be removed to accommodate large substrates

Powerful control system
The touch screen interface to the PLC provides full control for the following modes: manual and semi-automatic. Standard software makes it easy to support and avoid costly customization fees. Safety interlocks mitigate damage to the operator and the equipment. The sputter coater is equipped with a quartz crystal microbalance so the rate and the total deposition on samples can be observed.


The instrument usage is $5/min (actual deposition time). The users must log into the log book and the individual Excel sheet prior to using the instrument for billing purposes. The log book comments will help in assessing a possible malfunction which may occur during the user’s time.


Yi Yi

C307 Chemistry